Cleaning Technology of Electronic Materials

Cleaning Interfaces in Layered Materials Heterostructures

D. G. Purdie, N. M. Pugno, T. Taniguchi, K. Watanabe, A. C. Ferrari, A. Lombardo 1 Cambridge Graphene Centre, University of Cambridge, Cambridge CB3 0FA, UK 2 Laboratory of Graphene and Bio-inspired Nanomaterials, Department of Civil, Environmental and Mechanical Engineering, University of Trento, Italy 3 School of Engineering and Materials Science, Queen Mary University of London, UK 4 Ket-lab...

Fundamentals of Dry Ice Blast Cleaning Technology

The Evolution of Silicon Wafer Cleaning Technology

The purity of wafer surfaces is an essential requisite for the successful fabrication of VLSI and ULSI silicon circuits. Wafer cleaning chemistry has remained essentially unchanged in the past 25 years and is based on hot alkaline and acidic hydrogen peroxide solutions, a process known as "RCA Standard Clean." This is still the primary method used in the industry. What has changed is its implem...

A Technology Package for Electronic Infrastructures of Health Tourism

Introduction: Information Technology creates a foundation for developing health tourism. The purpose of the current study was to provide an information technology package for electronic infrastructures of health tourism. Methods: In this review study, in order to find various dimensions of health tourism, articles related to electronic health tourism were searched in PubMed, Science Direct and ...

A Technology Package for Electronic Infrastructures of Health Tourism

Introduction: Information Technology creates a foundation for developing health tourism. The purpose of the current study was to provide an information technology package for electronic infrastructures of health tourism. Methods: In this review study, in order to find various dimensions of health tourism, articles related to electronic health tourism were searched in PubMed, Science Direct and ...